m2c microscopy measurement and calibration: Measurement and calibration technologies for 3D microscopy

Mmc 80 structure layout — MMC-80 Structure Layout and SEM Image

Mmc 80 sem image — MMC-80 Structure Layout and SEM Image

3D calibration standards SPM

3D standards for calibration of topographical SPM measurements. Simultaneous calibration of horizontal scale, height scale, lateral and vertical shearing enables quantitative 3D SPM measurements.

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Mmc 80 4bsd structure layout — MMC-80-4BSD Structure Layout and SEM Image

Mmc 80 4bsd sem image — MMC-80-4BSD Structure Layout and SEM Image

3D calibration standards SEM

3D standards for calibration of topographical SEM measurements with 4-Quadrant BSE detector (4Q BSD). Simultaneous calibration of horizontal and height scale enables quantitative 3D SEM measurements.

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3D calibration software microCal

Easy-to-handle and automated geometric calibration of your microscope with 3d calibration samples. 3D measurement data of m2c calibration structures are automatically analysed and compared to the provided reference data.

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3D SEM software microShape

Software for creation, visualization and analyzing 3D surface models from SEM images by application of a 4-quadrant backscatter electron (4Q BSE) detector.

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Measurement and calibration technologies for 3D microscopy

m2c provides innovative products for measurement and calibration technologies in 3D microscopy. m2c 3D calibration standards, together with dedicated calibration software, enable a fast and more accurate calibration of your microscope. Application of m2c 3D software allows you to determine surface topography with your SEM and also to verify the measurement accuracy.

m2c helps to find the best solutions for your measurement and calibration tasks. We provide customized solutions, including software development and manufacturing of special designed micro- and nano-structures with FIB.

News

October 23, 2018

3D calibration now integrated in DISS SEM control

May 25, 2018

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EMC 2020