m2c microscopy measurement & calibration m2c microscopy measurement and calibration

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MMC-80-4BSD Structure Layout and SEM Image

3D calibration standards SEM

3D standards for calibration of topographical SEM measurements with 4-Quadrant BSE detector (4Q BSD). Simultaneous calibration of horizontal and height scale enables quantitative 3D SEM measurements.

Non-committal request


SPM data MMC-80-4BSD

3D SEM calibration structures consist of an array of three multi level single pyramids and contain a spherical element for the calibration of the four backscatter detectors. The spherical element has a base diameter of 10 µm and a height of about 1µm. The design of the calibration structure includes circular reference marks (nanomarker) with exactly measured centre coordinates (reference information). In combination with our 3D calibration software microCal, the calculation of all three scales of your 4Q-BSE-detector system can easily be achieved. We provide the reference information as a data file on CD/ROM together with the 3D calibration structure.


3D SEM calibration structures are available for several scan areas, from 40 μm x 40 μm and up to 80 μm x 80 μm. The complete structure with three pyramidal elements (full area) or a single pyramidal element (quarter area) may be used for the automated calibration process.

Type Device Size (µm²) Number of Structures Steps Step Height (nm) Total Height (nm) Gradient (deg) Nanomarker Diameter (nm)
MMC-80-4BSD 4Q-BSD-SEM 90x90 4 3 1000 3000 38.5 800
MMC-40-4BSD 4Q-BSD-SEM 45x45 4 3 600 1800 56 600

Please note: This table contains only nominal values. The real dimensions differ from these nominal values. For calibration, the reference marks have to be used. To provide a traceable calibration, reference measurements are performed by the German metrological institute PTB upon request.